However, detailed information on R2R NIL, particularly regarding

However, detailed information on R2R NIL, particularly regarding process and stability control, is still limited as there are still many challenges and issues to be solved in the R2R NIL process. Nevertheless, further extensive and thorough studies on the process are crucial to solve these challenges

to realize the implementation of R2R NIL for commercial applications in the near future. Acknowledgements The authors would like to thank Universiti Sains Malaysia for funding this research work through the USM Delivering Excellence (DE2012) Grant. References 1. Liu L, Zhang Y, Wang W, Gu C, Bai X, Wang E: Nanosphere lithography for the fabrication of ultranarrow graphene nanoribbons and on-chip bandgap tuning of graphene. Adv Mater 2011, 23:1246–1251. 10.1002/adma.20100384721381123CrossRef 2. Mohamed K: AZD1080 nmr Three-dimensional patterning using ultraviolet

curable nanoimprint lithography. PhD thesis. University of Canterbury, Electrical and Computer Engineering; 2009. 3. Chou SY, Krauss PR, Renstrom PJ: Imprint of sub‒25 nm vias and trenches in polymers. Appl Phys Lett 1995, 67:3114–3116. 10.1063/1.114851CrossRef 4. Guo LJ: Nanoimprint lithography: methods and material requirements. Adv Mater 2007, 19:495–513. 10.1002/adma.200600882CrossRef 5. Alkaisi MM, Mohamed K: Three-dimensional patterning using ultraviolet nanoimprint lithography. In Lithography. Edited by: Wang M. Rijeka: InTech; 2010:571–595. 6. Kim J-G, Sim Y, Cho Y, Seo J-W, Kwon S, Park J-W, Choi H-G, Kim H, Lee S: Large area pattern replication by nanoimprint lithography for LCD–TFT application. www.selleckchem.com/products/emricasan-idn-6556-pf-03491390.html Microelectron Eng 2009, 86:2427–2431. 10.1016/j.mee.2009.05.006CrossRef 3-oxoacyl-(acyl-carrier-protein) reductase 7. Holland ER, Jeans

A, Mei P, Taussig CP, Elder RE, Bell C, Howard E, Stowell J, O’Rourke S: An enhanced flexible color filter via imprint lithography and inkjet deposition methods. J Display Technol 2011, 7:311–317.CrossRef 8. Chou SY, Krauss PR, Renstrom PJ: Nanoimprint lithography. J Vac Sci Tech B 1996, 14:4129–4133. 10.1116/1.588605CrossRef 9. Häffner M, Heeren A, Fleischer M, Kern D, Schmidt G, Molenkamp L: Simple high resolution nanoimprint-lithography. Microelectron Eng 2007, 84:937–939. 10.1016/j.mee.2007.01.020CrossRef 10. Le NV, Dauksher WJ, Gehoski KA, Nordquist KJ, Ainley E, Mangat P: Direct pattern transfer for sub-45 nm features using nanoimprint lithography. Microelectron Eng 2006, 83:839–842. 10.1016/j.mee.2006.01.254CrossRef 11. Lan H, Ding Y: Nanoimprint lithography. In Lithography. Edited by: Wang M. Rijeka: InTech; 2010:457–494. 12. Sohn K-J, Park JH, Lee D-E, Jang H-I, Lee WI: Effects of the process temperature and rolling speed on the thermal roll-to-roll imprint lithography of flexible polycarbonate film. J Micromech Microeng 2013, 23:035024. 10.1088/0960-1317/23/3/SC79 price 035024CrossRef 13.

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